Contact: Keithley Instruments, Inc.
28775 Aurora RoadCleveland, Ohio 44139

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Keithley System Named Most Innovative
at Semiconductor Industry Show

Cleveland, Ohio - August 14, 2003 - Keithley Instruments, Inc. (NYSE: KEI) announced today that attendees at the Final Manufacturing segment of the Semicon West 2003 semiconductor industry trade show selected Keithley's Model S630DC/RF APT Automated Parametric Test System as the most innovative product at the show. The award was presented by Solid State Technology magazine. More than 500 companies exhibited their products at the show.

The APT system is used to measure the electrical parameters of semiconductor devices during development, characterization, and production, and before the semiconductor wafer has been separated into individual "chips". The APT system can measure both direct current (DC) and radio frequency (RF) parameters without changing test setups, which greatly reduces the time and cost of testing advanced devices. The system is compatible with both the current 200mm wafer size in use today and the new 300mm wafer size being adopted by semiconductor production facilities.

How Products Were Chosen. Solid State Technology magazine invited Semicon West attendees to vote on the most valuable products they saw at the trade show, which took place earlier this month in San Jose, California. Categories included Best Solution to a Problem, Most Innovative Product, and Best Cost-of-Ownership Product. Winners were announced immediately following the event.

About Keithley Instruments. Keithley Instruments, Inc. provides optical and electrical measurement solutions from DC to RF (radio frequency) to the wireless, semiconductor, optoelectronics, and other electronics manufacturing industries. Engineers and scientists around the world use Keithley's advanced hardware and software for process monitoring, production test, and basic research.

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